Sub Test()
' Set a VBE reference to Microsoft Word Object Library

    Dim WDApp As Word.Application
    Dim WDDoc As Word.Document

    ' Open new instance of Word
    Set WDApp = CreateObject(Class:="Word.Application")
    ' Open a Word document
    Set WDDoc = WDApp.Documents.Open(Filename:="h:\test.doc")
    
    ' Manipulate
    MsgBox WDDoc.Words.Count
    
    ' Close the document
    WDDoc.Close SaveChanges:=False
    ' Clean up the variable
    Set WDDoc = Nothing
    ' Close the application
    WDApp.Quit
    ' Clean up the variable
    Set WDApp = Nothing
End Sub

....
VarClear(wordApp); // из процессов исчезает

Set WDApp = Nothing